| 1. | Ats design for antenna matching devices
天线转台控制系统 |
| 2. | Automatic voltage matching device
自动电?平衡调整器 |
| 3. | Automatic speed matching device
自动?速装置 |
| 4. | Antenna matching device
天线匹配装置 |
| 5. | Aerial matching device
天线匹配器 |
| 6. | A set of icp etching system has been designed and manufactured through the analysis of the probe diagnosed results . during the study of the system , the emphasis is laid on the matching problem of icp coupled antenna via the rf matching device and rf power source
通过对探针诊断结果的分析，设计并制作一套icp刻蚀系统，重点研究icp耦合天线通过射频匹配器与射频功率源的匹配问题，得到很好的匹配效果，在射频输出功率为500w以内时，反射功率小于10w 。 |
